Concepedia

Heikki Kuisma

HK

Statistics

Publications

13

Citations

917

H-Index

11

Active since

1995

Affiliations

VTT Technical Research Centre of Finland(Current)

University of Helsinki

Vaisala (Finland)

Murata (Finland)

Heikki Kuisma is an author at VTT Technical Research Centre of Finland specializing in engineering, microelectronics, and mechanical engineering.

Top concepts

EngineeringMicroelectronicsMechanical EngineeringApplied PhysicsMicrofabricationInstrumentationMechatronicsVibration ControlKinematicsSurface Science

Publications per year

1995–2019

13

Publications

13

Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä et al. · Sensors and Actuators A Physical · 1995 · 461 citations

Electrical Engineering, Engineering, Physics +7

The influence of gas-surface interaction on gas-film damping in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä · Sensors and Actuators A Physical · 1998 · 108 citations

Gas-surface Interaction, Engineering, Microfabrication +9

A 3D micromechanical compass

Jukka Kyynäräinen, Jaakko Saarilahti, H. Kattelus et al. · Sensors and Actuators A Physical · 2007 · 87 citations

Geometric Modeling, Robot Kinematics, Engineering +10

Stability of wafer level vacuum encapsulated single-crystal silicon resonators

V. Kaajakari, Jyrki Kiihamäki, A. Oja et al. · Sensors and Actuators A Physical · 2005 · 74 citations

Wafer Scale Processing, Engineering, Physics +6

Model for gas film damping in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä · 2002 · 50 citations

Engineering, Fluid Mechanics, Mechanical Engineering +18

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