Concepedia

Juha Lahdenperä

JL

8

Publications

704

Citations

8

H-Index

1995

Active since

Affiliations

Vaisala (Finland)(Current)

VTT Technical Research Centre of Finland

University of Helsinki

Juha Lahdenperä is an author at Vaisala (Finland) specializing in engineering, mechanical engineering, and microelectronics.

Top concepts

EngineeringMicroelectronicsMechanical EngineeringInstrumentationMicrofabricationVibration ControlMechatronicsApplied PhysicsMechanical SystemsFluid Dynamics

Publications per year

1995–2006

8

Publications

8

Equivalent-circuit model of the squeezed gas film in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä et al. · Sensors and Actuators A Physical · 1995 · 461 citations

Electrical Engineering, Engineering, Physics +7

The influence of gas-surface interaction on gas-film damping in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä · Sensors and Actuators A Physical · 1998 · 108 citations

Gas-surface Interaction, Engineering, Microfabrication +9

Model for gas film damping in a silicon accelerometer

Timo Veijola, Heikki Kuisma, Juha Lahdenperä · 2002 · 50 citations

Engineering, Fluid Mechanics, Mechanical Engineering +18

Circuit Simulation Model Of Gas Damping In Microstructures With Nontrivial Geometries

Timo Veijola, T. Ryhinen, Heikki Kuisma et al. · Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95 · 2005 · 24 citations

Engineering, Fluid Mechanics, Mechanical Engineering +24

A bulk micromachined silicon angular rate sensor

Heikki Kuisma, Tapani Ryhänen, Juha Lahdenperä et al. · 2002 · 21 citations

Engineering, Soft Robotics, Micromachines +15

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