64
Publications
3.3K
Citations
28
H-Index
1998
Active since
Heng Yang is an author at Shanghai Institute of Microsystem and Information Technology specializing in engineering, mechanical engineering, and microfabrication.
Top concepts
EngineeringMechanical EngineeringMicrofabricationInstrumentationElectrical EngineeringApplied PhysicsMechanical SystemsMicroelectronicsVibration ControlMechatronics
Publications per year
1998–2024
64
64
Squeeze film air damping in MEMS
Minhang Bao, Heng Yang · Sensors and Actuators A Physical · 2007 · 676 citations
Energy transfer model for squeeze-film air damping in low vacuum
Minhang Bao, Heng Yang, Hao Yin et al. · Journal of Micromechanics and Microengineering · 2002 · 210 citations
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1–5 of 64