Concepedia

Publication | Open Access

A small-gap electrostatic micro-actuator for large deflections

DOIFull Paper Access

111

Citations

20

References

2015

Year

Holger Conrad, Harald Schenk, Bert Kaiser, S. Langa, Matthieu Gaudet, Klaus Schimmanz, Michael Stolz, Miriam Lenz
Nature Communications

References

YearCitations

Page 1