A novel asymmetric silicon micro-mirror for optical beam scanning display

Abstract

A simple asymmetric micro-mirror excited by an external piezoelectric ceramic vibrating element was shown to be effective for scanning an optical beam with an over-video-rate operating frequency at an over-30-degree beam-scanning angle. Using an SOI process simplifies the fabrication process and results in a very flat mirror surface. A structure consisting of two such mirrors (one horizontal and one vertical) was used to reproduce half-VGA computer images. The space effectiveness of this silicon micro-minor optical-beam scanner was demonstrated in a super-small wearable micro-mirror display device. Full VGA and XGA displays should be possible by adding simple signal processing.