3
Publications
117
Citations
3
H-Index
1991
Active since
Affiliations
C. Burbaum is an author at FZI Research Center for Information Technology specializing in microfabrication, mechanical engineering, and engineering.
Top concepts
EngineeringMicrofabricationMechanical EngineeringMicrofluidicsMaterial ScienceSensorsPhotonicsSensor DesignApplied PhysicsInstrumentation
Publications per year
1991–2002
3
3
Fabrication of capacitive acceleration sensors by the LIGA technique
C. Burbaum, J. Mohr, P. Bley et al. · Sensors and Actuators A Physical · 1991 · 81 citations
LIGA-based flexible microstructures for fiber-chip coupling
Arnd Rogner, W. Ehrfeld, D. Münchmeyer et al. · Journal of Micromechanics and Microengineering · 1991 · 20 citations
Fabrication of microsensor and microactuator elements by the LIGA-process
J. J. Mohr, P. Bley, C. Burbaum et al. · TRANSDUCERS '91: 1991 International Conference on Solid-State Sensors and Actuators. Digest of Technical Papers · 2002 · 16 citations
Engineering, Mechanical Engineering, Microelectromechanical Systems +18
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