Concepedia

Capacitive Microactuators

Capacitive Microactuator is a microelectromechanical system actuator that converts electrical energy into mechanical motion through electrostatic forces generated by varying capacitance between conductive structures, distinguished from other microactuators by its reliance on changes in electrical capacitance to produce displacement.

71

Publications

2.4K

Citations

229

Authors

78

Institutions

Publications per year

2017–2026

16

Variants

Capacitive Microactuator

Parents

Publications

71

Precision readout circuits for capacitive microaccelerometers

N. Yazdi, Haluk Külah, K. Najafi · 2006 · 127 citations · Full text

, , +16

Modeling and design of variable-geometry electrostatic microactuators

Fehmi Najar, S. Choura, S. El-Borgi et al. · Journal of Micromechanics and Microengineering · 2004 · 123 citations

, , +17

Optimization of MEMS capacitive accelerometer

M.T. Benmessaoud, Mekkakia Maaza Nasreddine · Microsystem Technologies · 2013 · 112 citations · Full text

, , +14

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Andrew C.-L. Hung, Harrison Y.-H. Lai, Ta‐Wei Lin et al. · Sensors and Actuators A Physical · 2014 · 110 citations

, , +16

A Closed-Loop <formula formulatype="inline"> <tex Notation="TeX">$\Sigma\Delta$</tex></formula> Interface for a High-Q Micromechanical Capacitive Accelerometer With 200 ng/<formula formulatype="inline"><tex Notation="TeX">$ \surd$</tex></formula>Hz Input Noise Density

Honglin Xu, Xiaowei Liu, Liang Yin · IEEE Journal of Solid-State Circuits · 2015 · 104 citations

, , +17

1–5 of 71

Authors

229

  1. BA
    B.V. Amini

    Georgia Institute of Technology, United States

    3 publications · 87 citations

    3

    h-index

  2. MK
    Michaël Kraft

    University of Southampton, United Kingdom

    3 publications · 80 citations

    3

    h-index

  3. AK
    A.A. Kuijpers

    University of Twente, Netherlands

    3 publications · 63 citations

    3

    h-index

  4. MS
    Michael S.-C. Lu

    National Tsing Hua University, Taiwan

    3 publications · 136 citations

    3

    h-index

  5. FA
    Farrokh Ayazi

    Georgia Institute of Technology, United States

    3 publications · 87 citations

    3

    h-index

1–5 of 229

Institutions

78

  1. University of California, Berkeley

    Berkeley, United States

    4 h-index

    15 publications

    629 citations

  2. National Tsing Hua University

    Hsinchu, Taiwan

    4 h-index

    8 publications

    348 citations

  3. Urmia University

    Urmia, Iran

    4 h-index

    10 publications

    309 citations

  4. Georgia Institute of Technology

    Atlanta, United States

    4 h-index

    9 publications

    249 citations

  5. University of Twente

    Enschede, The Netherlands

    3 h-index

    15 publications

    315 citations

  6. University of Michigan

    Ann Arbor, United States

    3 h-index

    7 publications

    553 citations

  7. Shanghai Jiao Tong University

    Shanghai, China

    2 h-index

    10 publications

    156 citations

  8. Institute of Electronics

    Beijing, China

    2 h-index

    6 publications

    118 citations

1–8 of 78

Venues

  1. Sensors and Actuators A Physical

    9 publications · 370 citations

    9

    h-index

  2. Journal of Micromechanics and Microengineering

    JMM · 6 publications · 239 citations

    6

    h-index

  3. Journal of Microelectromechanical Systems

    5 publications · 163 citations

    5

    h-index

  4. Microsystem Technologies

    5 publications · 182 citations

    5

    h-index

  5. IEEE Sensors Journal

    4 publications · 105 citations

    4

    h-index

1–5