Michael S.-C. Lu

Laminated high-aspect-ratio microstructures in a conventional CMOS process

Gary K. Fedder, S. Santhanam, Michael L. Reed et al. · Sensors and Actuators A Physical · 1996 · 249 citations

Materials Engineering, Electrical Engineering, Wafer Scale Processing +8

Single-chip computers with microelectromechanical systems-based magnetic memory (invited)

L.R. Carley, James A. Bain, Gary K. Fedder et al. · Journal of Applied Physics · 2000 · 120 citations · Full text

Non-volatile Memory, Engineering, Emerging Memory Technology +21

Position Control of Parallel-Plate Microactuators for Probe-Based Data Storage

Michael S.-C. Lu, Gary K. Fedder · Journal of Microelectromechanical Systems · 2004 · 111 citations

Electrical Engineering, Engineering, Microfabrication +14

An electrostatically driven 2D micro-scanning mirror with capacitive sensing for projection display

Andrew C.-L. Hung, Harrison Y.-H. Lai, Ta‐Wei Lin et al. · Sensors and Actuators A Physical · 2014 · 106 citations

Engineering, Display Technology, Microscopy +10

Laminated high-aspect-ratio microstructures in a conventional CMOS process

Gary K. Fedder, S. Santhanam, Michael L. Reed et al. · 2002 · 106 citations

Engineering, Mechanical Engineering, Conventional Cmos Processing +18