Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures

Critical Review: Adhesion in surface micromechanical structures

Roya Maboudian, Roger T. Howe · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1997 · 830 citations

Engineering, Materials Engineering, Materials Science +17

High-aspect-ratio, ultrathick, negative-tone near-UV photoresist and its applications for MEMS

H. Lorenz, M. Despont, N. Fahrni et al. · Sensors and Actuators A Physical · 1998 · 573 citations · Full text

Engineering, Materials Engineering, Materials Science +12

Stiction in surface micromachining

Niels R. Tas, T. Sonnenberg, Henri Jansen et al. · Journal of Micromechanics and Microengineering · 1996 · 544 citations · Full text

Engineering, Materials Science, Mechanical Engineering +16

Influence of processing conditions on the thermal and mechanical properties of SU8 negative photoresist coatings

Ru Feng, Richard J. Farris · Journal of Micromechanics and Microengineering · 2002 · 352 citations

Natural Sciences, Materials Engineering, Materials Science +17

Negative photoresists for optical lithography

Jane M. Shaw, Jeffrey D. Gelorme, N. LaBianca et al. · IBM Journal of Research and Development · 1997 · 339 citations

Engineering, Chemistry, Materials Science +14