B.-Y. Shew

UV-LIGA interferometer biosensor based on the SU-8 optical waveguide

B.-Y. Shew, Chien‐Nan Kuo, Y.C. Huang et al. · Sensors and Actuators A Physical · 2005 · 67 citations

Engineering, Bioengineering, Biomedical Engineering +14

Monolithic SU-8 micro-interferometer for biochemical detections

B.-Y. Shew, Yao Cheng, Y.H. Tsai · Sensors and Actuators A Physical · 2007 · 54 citations

Engineering, Bioengineering, Biomedical Engineering +14

E-beam lithography and electrodeposition fabrication of thick nanostructured devices

T. N. Lo, Y T Chen, Chun‐Yang Chiu et al. · Journal of Physics D Applied Physics · 2007 · 32 citations · Full text

Engineering, Materials Engineering, Materials Science +16

Fabrication of support structures to prevent SU-8 stiction in high aspect ratio structures

Kaushal Vora, Andrew G. Peele, B.-Y. Shew et al. · Microsystem Technologies · 2006 · 24 citations

Natural Sciences, Materials Engineering, Materials Science +12

Ultra-deep LIGA process and its applications

Yao Cheng, B.-Y. Shew, Minking K. Chyu et al. · Nuclear Instruments and Methods in Physics Research Section A Accelerators Spectrometers Detectors and Associated Equipment · 2001 · 18 citations

Engineering, Biomedical Engineering, Microfabrication +3