Semiconductor Science and Technology · 2001 · 19 citations · 19 references
EngineeringElectrical EngineeringMaterials ScienceElectronic MaterialsSemiconductor DevicesSemiconductor MaterialsDopingMetal-oxide-semiconductor Field-effect TransistorsSemiconductor Device MaterialsSemiconductor Thin FilmsThin Film Electrical PropertiesThin-film TransistorsHydrogen PassivationLow-pressure Chemical Vapor DepositionPolysiliconSiliconSilicon DioxideSilicon-on-insulator TechnologyThermal AnnealingThreshold Voltage
International audience
19
High performance low-temperature poly-Si n-channel TFTs for LCD
A. Mimura, N. Konishi, Kyosuke Ono et al. · IEEE Transactions on Electron Devices · 1989 · 174 citations
L. Haji, Pierre-Yves Joubert, J. Stoëmenos et al. · Journal of Applied Physics · 1994 · 139 citations · Full text
Natural Sciences, Materials Engineering, Materials Science +17