Thin film transistors fabricated by in situ doped unhydrogenated polysilicon films obtained by solid phase crystallization

Laurent Pichon, K. Mourgues, F. Raoult, T. Mohammed-Brahim, K. Kis-Sion, D. Briand, O. Bonnaud

Semiconductor Science and Technology · 2001 · 19 citations · 19 references

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