Concepedia

Publication | Closed Access

Growth mechanism of TiN film on dielectric films and the effects on the work function

DOI

40

Citations

8

References

2005

Year

K. Choi, Patrick Lysaght, Husam N. Alshareef, C. Huffman, H.C. Wen, Rusty Harris, H.F. Luan, P. Y. Hung, Chris Sparks, Mónica Olvera de la Cruz,
Thin Solid Films

References

YearCitations

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