Direct pattern transfer for sub-45nm features using nanoimprint lithography - Concepedia

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Direct pattern transfer for sub-45nm features using nanoimprint lithography

13

Citations

4

References

2006

Year

Ngoc Van Le, William J. Dauksher, K. A. Gehoski, Kevin J. Nordquist, Eric S. Ainley, Pawitter J. S. Mangat

Microelectronic Engineering

Direct Pattern TransferEngineeringBeam LithographyMicrofabricationApplied PhysicsPattern TransferNanolithographyNanofabricationMicroelectronics3D PrintingNanolithography Method

References

	Year	Citations

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