Concepedia

Lithographic Surface Patterning

Lithographic Surface Patterning is a nanofabrication technique that uses pattern transfer through light, electrons, or other forms of radiation via a mask or direct writing to create precisely defined, micro- or nano-scale surface topographies on substrates.

982

Publications

55.6K

Citations

4.2K

Authors

926

Institutions

Publications per year

2017–2026

119

Parents

Publications

982

Ultrathin Epitaxial Graphite:  2D Electron Gas Properties and a Route toward Graphene-based Nanoelectronics

Claire Berger, Zhimin Song, Tianbo Li et al. · The Journal of Physical Chemistry B · 2004 · 3.5K citations · Full text

, , +17

Block Copolymer Lithography: Periodic Arrays of ~10 <sup>11</sup> Holes in 1 Square Centimeter

Miri Park, Christopher Harrison, P. M. Chaikin et al. · Science · 1997 · 1.9K citations

, , +17

Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol ‘‘ink’’ followed by chemical etching

Amit Kumar, George M. Whitesides · Applied Physics Letters · 1993 · 1.6K citations

, , +17

Nanosphere lithography: A materials general fabrication process for periodic particle array surfaces

John C. Hulteen, Richard P. Van Duyne · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1995 · 1.4K citations

, , +14

Complex Optical Surfaces Formed by Replica Molding Against Elastomeric Masters

Younan Xia, Enoch Kim, Xiao-Mei Zhao et al. · Science · 1996 · 644 citations

, , +15

1–5 of 982

Authors

4.2K

  1. CK
    Christopher K. Ober

    Cornell University, United States

    16 publications · 635 citations

    13

    h-index

  2. CA
    Chad A. Mirkin

    Northwestern University, United States

    13 publications · 1.3K citations

    12

    h-index

  3. HL
    Heon Lee

    Korea University, South Korea

    11 publications · 473 citations

    11

    h-index

  4. YE
    Yasin Ekinci

    Paul Scherrer Institute, Switzerland

    10 publications · 286 citations

    10

    h-index

  5. GM
    George M. Whitesides

    Harvard University, United States

    9 publications · 2.8K citations

    9

    h-index

1–5 of 4.2K

Institutions

926

  1. Massachusetts Institute of Technology

    Cambridge, United States

    22 h-index

    116 publications

    8.1K citations

  2. Centre National de la Recherche Scientifique

    Paris, France

    17 h-index

    110 publications

    3.9K citations

  3. Korea Advanced Institute of Science and Technology

    Daejeon, South Korea

    17 h-index

    86 publications

    6.5K citations

  4. Cornell University

    Ithaca, United States

    16 h-index

    97 publications

    5.2K citations

  5. Northwestern University

    Evanston, United States

    16 h-index

    72 publications

    8.7K citations

  6. Chinese Academy of Sciences

    Beijing, China

    14 h-index

    78 publications

    2.2K citations

  7. Paul Scherrer Institute

    Villigen, Switzerland

    14 h-index

    63 publications

    2.3K citations

  8. Korea University

    Seoul, South Korea

    13 h-index

    55 publications

    2.1K citations

1–8 of 926

Venues

  1. Applied Physics Letters

    63 publications · 6.1K citations

    36

    h-index

  2. Advanced Materials

    54 publications · 4.1K citations

    35

    h-index

  3. Microelectronic Engineering

    107 publications · 3.3K citations

    32

    h-index

  4. Nano Letters

    27 publications · 2.3K citations

    24

    h-index

  5. 21

    h-index

1–5