Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers - Concepedia

Concepedia

Publication | Closed Access

Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers

139

Citations

12

References

2002

Year

V. Seidemann, Sebastian Bütefisch, S. Büttgenbach

Sensors and Actuators A Physical

Materials ScienceEngineeringSoft RoboticsMicromachinesMicrofabricationMechanical EngineeringMechatronicsNano Electro Mechanical SystemMicroactuatorMicro GrippersElectronic PackagingMicroelectronicsMicro-electromechanical System

References

	Year	Citations

Page 1