V. Seidemann

Fabrication and investigation of in-plane compliant SU8 structures for MEMS and their application to micro valves and micro grippers

V. Seidemann, Sebastian Bütefisch, S. Büttgenbach · Sensors and Actuators A Physical · 2002 · 139 citations

Engineering, Materials Science, Mechanical Engineering +11

SU8-micromechanical structures with in situ fabricated movable parts

V. Seidemann, Jens Rabe, M. Feldmann et al. · Microsystem Technologies · 2002 · 98 citations

Engineering, Materials Engineering, Materials Science +13

Novel micro-pneumatic actuator for MEMS

Sebastian Bütefisch, V. Seidemann, S. Büttgenbach · Sensors and Actuators A Physical · 2002 · 97 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +12

SU-8 Optical Accelerometers

Andreu Llobera, V. Seidemann, J.A. Plaza et al. · Journal of Microelectromechanical Systems · 2007 · 57 citations

Engineering, Mechanical Engineering, Mechatronics Engineering +17

Microcoils and microrelays — an optimized multilayer fabrication process

Markus Ohnmacht, V. Seidemann, S. Büttgenbach · Sensors and Actuators A Physical · 2000 · 32 citations

Engineering, Manufacturing Engineering, Materials Science +10