STI process steps for sub-quarter micron CMOS - Concepedia

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STI process steps for sub-quarter micron CMOS

19

Citations

3

References

1998

Year

P. Sallagoity, F. Gaillard, M. Rivoire, M. Paoli, M. Haond, S McClathie

Microelectronics Reliability

Electrical EngineeringPhysical Design (Electronics)EngineeringVlsi DesignMicrofabricationSti Process StepsComputer EngineeringMicroelectronics

References

	Year	Citations

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