Development of single-ion implantation — controllability of implanted ion number

References

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Long-lifetime, reliable liquid metal ion sources for boron, arsenic, and phosphorus William M. Clark, R. L. Seliger, M. Utlaut, Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena Materials ScienceInorganic ChemistryChemical EngineeringBoron NitrideEngineering	1987	30
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