M. Utlaut

Fundamental limits to imaging resolution for focused ion beams

Jon Orloff, L. W. Swanson, M. Utlaut · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 109 citations

Engineering, Electron Microscopy, Medical Imaging +10

Direct observations of atomic diffusion by scanning transmission electron microscopy

M. Isaacson, D. Kopf, M. Utlaut et al. · Proceedings of the National Academy of Sciences · 1977 · 87 citations · Full text

Materials Science, Atomic Diffusion, Engineering +15

The focused ion beam as an integrated circuit restructuring tool

J. Melngailis, C. R. Musil, E.H. Stevens et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 82 citations

Materials Science, Electrical Engineering, Ion Implantation +15

The study of the adsorption and diffusion of heavy atoms on light element substrates by means of the atomic resolution stem

M. Isaacson, John P. Langmore, N. W. Parker et al. · Ultramicroscopy · 1976 · 79 citations

Surface Characterization, Atomic Resolution Stem, Engineering +11

Direct observation of the behavior of heavy single atoms on amorphous carbon substrates

M. Utlaut · Physical review. B, Condensed matter · 1980 · 41 citations

Engineering, Electron Diffraction, Adatom Motion +20