Concepedia
Statistics
Publications
21
Citations
741
H-Index
15
Active since
1976
Affiliations
HRL Laboratories (United States)(Current)
University of Portland
Fermi National Accelerator Laboratory
University of Chicago
Pennsylvania State University
M. Utlaut is an author at HRL Laboratories (United States) specializing in engineering, applied physics, and physics.
Top concepts
EngineeringApplied PhysicsPhysicsMaterial ScienceMicroscopyMicroelectronicsAtomic PhysicsInstrumentationSurface ScienceIon Beam Physics
Publications per year
1976–2011
Fundamental limits to imaging resolution for focused ion beams
Jon Orloff, L. W. Swanson, M. Utlaut · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 109 citations
Engineering, Electron Microscopy, Medical Imaging +10
Direct observations of atomic diffusion by scanning transmission electron microscopy
M. Isaacson, D. Kopf, M. Utlaut et al. · Proceedings of the National Academy of Sciences · 1977 · 87 citations · Full text
Materials Science, Atomic Diffusion, Engineering +15
The focused ion beam as an integrated circuit restructuring tool
J. Melngailis, C. R. Musil, E.H. Stevens et al. · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1986 · 82 citations
Materials Science, Electrical Engineering, Ion Implantation +15
The study of the adsorption and diffusion of heavy atoms on light element substrates by means of the atomic resolution stem
M. Isaacson, John P. Langmore, N. W. Parker et al. · Ultramicroscopy · 1976 · 79 citations
Surface Characterization, Atomic Resolution Stem, Engineering +11
Direct observation of the behavior of heavy single atoms on amorphous carbon substrates
M. Utlaut · Physical review. B, Condensed matter · 1980 · 41 citations
Engineering, Electron Diffraction, Adatom Motion +20
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