R. L. Seliger

A high-intensity scanning ion probe with submicrometer spot size

R. L. Seliger, J. W. Ward, V. Wang et al. · Applied Physics Letters · 1979 · 266 citations

Engineering, Nuclear Engineering, Instrumentation +6

High-resolution, ion-beam processes for microstructure fabrication

R. L. Seliger, R. L. Kubena, R. D. Olney et al. · Journal of Vacuum Science and Technology · 1979 · 156 citations

Engineering, Materials Engineering, Materials Science +15

A mass-separating focused-ion-beam system for maskless ion implantation

V. Wang, J. W. Ward, R. L. Seliger · Journal of Vacuum Science and Technology · 1981 · 87 citations

Engineering, Materials Engineering, Materials Science +10

FET fabrication using maskless ion implantation

R. L. Kubena, C. L. Anderson, R. L. Seliger et al. · Journal of Vacuum Science and Technology · 1981 · 76 citations

Engineering, Electrical Engineering, Materials Engineering +15

E×B Mass-Separator Design

R. L. Seliger · Journal of Applied Physics · 1972 · 75 citations

Natural Sciences, Physics, Electromagnetism +8