R. L. Kubena

A high-intensity scanning ion probe with submicrometer spot size

R. L. Seliger, J. W. Ward, V. Wang et al. · Applied Physics Letters · 1979 · 266 citations

Optical Materials, Engineering, Analytical Instrumentation +12

High-resolution, ion-beam processes for microstructure fabrication

R. L. Seliger, R. L. Kubena, R. D. Olney et al. · Journal of Vacuum Science and Technology · 1979 · 156 citations

Engineering, Electron-beam Lithography, Microscopy +16

A low magnification focused ion beam system with 8 nm spot size

R. L. Kubena, J. W. Ward, F. P. Stratton et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 84 citations

Engineering, Electron-beam Lithography, Microscopy +17

FET fabrication using maskless ion implantation

R. L. Kubena, C. L. Anderson, R. L. Seliger et al. · Journal of Vacuum Science and Technology · 1981 · 76 citations

Engineering, Ion Sources, Maskless Ion Implantation +16

A new miniaturized surface micromachined tunneling accelerometer

R. L. Kubena, Gary M. Atkinson, William P. Robinson et al. · IEEE Electron Device Letters · 1996 · 63 citations

Electrical Engineering, Engineering, Micromachines +13