J. W. Ward

A high-intensity scanning ion probe with submicrometer spot size

R. L. Seliger, J. W. Ward, V. Wang et al. · Applied Physics Letters · 1979 · 266 citations

Engineering, Nuclear Engineering, Instrumentation +6

High-resolution, ion-beam processes for microstructure fabrication

R. L. Seliger, R. L. Kubena, R. D. Olney et al. · Journal of Vacuum Science and Technology · 1979 · 156 citations

Engineering, Materials Engineering, Materials Science +15

A mass-separating focused-ion-beam system for maskless ion implantation

V. Wang, J. W. Ward, R. L. Seliger · Journal of Vacuum Science and Technology · 1981 · 87 citations

Engineering, Materials Engineering, Materials Science +10

A low magnification focused ion beam system with 8 nm spot size

R. L. Kubena, J. W. Ward, F. P. Stratton et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 84 citations

Natural Sciences, Materials Science, Microfabrication +10

Overview of C-2W: high temperature, steady-state beam-driven field-reversed configuration plasmas

H. Gota, Michl Binderbauer, T. Tajima et al. · Nuclear Fusion · 2021 · 74 citations

Natural Sciences, Nuclear Engineering, Physics +16