Concepedia

K. Umemura

KU

11

Publications

181

Citations

10

H-Index

1983

Active since

Affiliations

Hitachi (Japan)(Current)

K. Umemura is an author at Hitachi (Japan) specializing in engineering, applied physics, and materials science.

Top concepts

EngineeringApplied PhysicsMaterial ScienceElectrochemistryMicrostructureInstrumentationChemistryMicroelectronicsMicrofabricationChemical Engineering

Publications per year

1983–2000

11

Publications

11

Ion formation in alloy liquid-metal-ion sources

T. Ishitani, K. Umemura, Yoshimi Kawanami · Journal of Applied Physics · 1987 · 22 citations

Materials Science, Ion Implantation, Identical Field Strength +13

Development of boron liquid–metal–ion source

T. Ishitani, K. Umemura, Shigeyuki Hosoki et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1984 · 22 citations

Materials Engineering, Materials Science, Chemical Engineering +13

Favorable source material in liquid-metal-ion sources for focused beam applications

T. Ishitani, K. Umemura, Yoshimi Kawanami · Journal of Vacuum Science & Technology B Microelectronics Processing and Phenomena · 1988 · 21 citations

Materials Engineering, Materials Science, Ion Implantation +13

A New Focused Ion Beam Microsampling Technique for TEM Observation of Site-Specific Areas

Tsuyoshi Ohnishi, H. Koike, T. Ishitani et al. · Proceedings - International Symposium for Testing and Failure Analysis · 1999 · 21 citations

Engineering, Electron-beam Lithography, Microscopy +24

Mass and Energy Analyses of Gallium-Indium Liquid-Metal-Ion Sources

Tohru Ishitani, K. Umemura, Hifumi Tamura · Japanese Journal of Applied Physics · 1985 · 17 citations

Materials Science, Energy Analyses, Electrical Engineering +12

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