Mass and Energy Analyses of Gallium-Indium Liquid-Metal-Ion Sources

Abstract

Mass and energy analyses of ions emitted from Ga-In alloy LMI sources were carried out using a double-focusing mass spectrometer to compare these data with those from single-element Ga and In LMI sources. A more distinct low energy shoulder was observed on the Ga + energy distribution curve for the Ga-In source at the lower source-current and the higher emitter temperature. A similar shoulder was also observed for the Ga source but not for the In source. The Ga shoulder for the Ga-In source suggests Ga preferential vaporization at the emitter and/or Ga preferential ionization in the vicinity of emitter.