Solid-State Electronics · 1996 · 11 citations · 11 references
EngineeringElectrical EngineeringMaterials ScienceMicroelectronicsSemiconductor DevicesSemiconductor MaterialsComplementary Metal-oxide-semiconductor TechnologyCurrent-voltage CharacteristicsMos CapacitorsOxide SemiconductorsSemiconductor InterfacesVery-large-scale Integration LayoutCapacitance-voltage CharacteristicsCapacitance-voltage CharacterizationCapacitance-voltage MeasurementsCapacitorsGate Oxide InterfacesInterface Trap DensityOxide Defect States
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A CV technique for measuring thin SOI film thickness
J. Chen, R. Solomon, T.Y. Chan et al. · IEEE Electron Device Letters · 1991 · 69 citations