Potential profile measurement of GaAs MESFETs passivated with low-temperature grown GaAs layer by Kelvin probe force microscopy

Kelvin probe force microscopy

M. Nonnenmacher, M. O’Boyle, H. K. Wickramasinghe · Applied Physics Letters · 1991 · 2.3K citations

Natural Sciences, Materials Engineering, Materials Science +17

Two-dimensional surface dopant profiling in silicon using scanning Kelvin probe microscopy

Albert K. Henning, Todd Hochwitz, J. Slinkman et al. · Journal of Applied Physics · 1995 · 182 citations

Engineering, Materials Engineering, Materials Science +17

Kelvin probe force microscopy for potential distribution measurement of semiconductor devices

O. Vatel, Masafumi Tanimoto · Journal of Applied Physics · 1995 · 127 citations

Engineering, Electrical Engineering, Materials Science +17

Kelvin probe force microscopy for characterization of semiconductor devices and processes

Masafumi Tanimoto, O. Vatel · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 109 citations

Engineering, Electrical Engineering, Materials Science +17

Surface investigations with a Kelvin probe force microscope

M. Nonnenmacher, M. O’Boyle, H. K. Wickramasinghe · Ultramicroscopy · 1992 · 109 citations

Natural Sciences, Materials Science, Physics +14