Masafumi Tanimoto

Kelvin probe force microscopy for potential distribution measurement of semiconductor devices

O. Vatel, Masafumi Tanimoto · Journal of Applied Physics · 1995 · 127 citations

Engineering, Microscopy, Contact Resistance +21

Kelvin probe force microscopy for characterization of semiconductor devices and processes

Masafumi Tanimoto, O. Vatel · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 108 citations

Aluminium Nitride, Engineering, Microscopy +20

Measurements of the three-dimensional impurity profile in Si using chemical etching and scanning tunneling microscopy

Takako Takigami, Masafumi Tanimoto · Applied Physics Letters · 1991 · 43 citations

Chemical Etching, Electrical Engineering, Semiconductor Device +15

Scanning tunneling microscopy on molecular-beam-epitaxy-grown GaAs(001) surfaces

Masafumi Tanimoto, Jiro Ōsaka, Takako Takigami et al. · Ultramicroscopy · 1992 · 22 citations

Tunneling Microscopy, Physics, Microscopy +4

Tunneling spectroscopy of ultrathin oxide on Si structure and H-terminated Si surfaces

Michiharu Tabe, Masafumi Tanimoto · Applied Physics Letters · 1991 · 20 citations

Materials Science, Engineering, Tunneling Microscopy +14