O. Vatel

Self-organized growth of regular nanometer-scale InAs dots on GaAs

J. M. Moison, F. Houzay, F. Barthe et al. · Applied Physics Letters · 1994 · 927 citations

Materials Science, Semiconductors, Strained Structures +14

Kelvin probe force microscopy for potential distribution measurement of semiconductor devices

O. Vatel, Masafumi Tanimoto · Journal of Applied Physics · 1995 · 127 citations

Engineering, Microscopy, Contact Resistance +21

Kelvin probe force microscopy for characterization of semiconductor devices and processes

Masafumi Tanimoto, O. Vatel · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 108 citations

Aluminium Nitride, Engineering, Microscopy +20

Silicon roughness induced by plasma etching

R. Petri, Pascal Brault, O. Vatel et al. · Journal of Applied Physics · 1994 · 106 citations

Engineering, Plasma Physics, Single-crystal Silicon Roughness +18

Quantitative Microroughness Analysis down to the Nanometer Scale

Philippe Dumas, B Bouffakhreddine, Claude Amra et al. · Europhysics Letters (EPL) · 1993 · 98 citations

Cross Characterizations, Afm Measurements, Engineering +23