Statistics
Publications
31
Citations
2.1K
H-Index
19
Active since
1977
Philippe Dumas is an author at Centre National de la Recherche Scientifique specializing in engineering, applied physics, and physics.
Publications per year
1977–2018
31
31
Silicon roughness induced by plasma etching
R. Petri, Pascal Brault, O. Vatel et al. · Journal of Applied Physics · 1994 · 106 citations
Engineering, Plasma Physics, Single-crystal Silicon Roughness +18
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1–5 of 31