J. Slinkman

Two-dimensional surface dopant profiling in silicon using scanning Kelvin probe microscopy

Albert K. Henning, Todd Hochwitz, J. Slinkman et al. · Journal of Applied Physics · 1995 · 180 citations

Engineering, Microscopy, Silicon On Insulator +19

Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy

C. C. Williams, J. Slinkman, W. P. Hough et al. · Applied Physics Letters · 1989 · 167 citations

Engineering, Microscopy, Dopant Density +19

Lateral dopant profiling in semiconductors by force microscopy using capacitive detection

David W. Abraham, Charles Williams, J. Slinkman et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1991 · 90 citations

Engineering, Microscopy, Dopant Density +20

Capacitive effects on quantitative dopant profiling with scanned electrostatic force microscopes

Todd Hochwitz, Albert K. Henning, Chris Levey et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 87 citations

Engineering, Microscopy, Mechanical Engineering +22

A Thin-Film SOI 180nm CMOS RF Switch Technology

A. Botula, Alvin Joseph, J. Slinkman et al. · 2009 · 84 citations

Low-power Electronics, Electrical Engineering, Rf Switch Applications +12