Albert K. Henning

Two-dimensional surface dopant profiling in silicon using scanning Kelvin probe microscopy

Albert K. Henning, Todd Hochwitz, J. Slinkman et al. · Journal of Applied Physics · 1995 · 182 citations

Engineering, Materials Engineering, Materials Science +17

Capacitive effects on quantitative dopant profiling with scanned electrostatic force microscopes

Todd Hochwitz, Albert K. Henning, Chris Levey et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 87 citations

Natural Sciences, Materials Engineering, Materials Science +17

Imaging integrated circuit dopant profiles with the force-based scanning Kelvin probe microscope

Todd Hochwitz, Albert K. Henning, Chris Levey et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 1996 · 51 citations

Engineering, Electrical Engineering, Materials Science +17

Microfluidic MEMS for semiconductor processing

Albert K. Henning, John S. Fitch, Edward B. Dehan et al. · IEEE Transactions on Components Packaging and Manufacturing Technology Part B · 1998 · 35 citations

Engineering, Electrical Engineering, Mechanical Engineering +10

<title>Out-of-plane microstructures using stress engineering of thin films</title>

Chia-Lun Tsai, Albert K. Henning · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1995 · 17 citations

Engineering, Materials Engineering, Materials Science +17