W. P. Hough

Scanning capacitance microscopy on a 25 nm scale

C. C. Williams, W. P. Hough, S. A. Rishton · Applied Physics Letters · 1989 · 214 citations

Materials Science, Capacitance Variations, Electrical Engineering +14

Lateral dopant profiling with 200 nm resolution by scanning capacitance microscopy

C. C. Williams, J. Slinkman, W. P. Hough et al. · Applied Physics Letters · 1989 · 167 citations

Engineering, Microscopy, Dopant Density +19

Lateral dopant profiling on a 100 nm scale by scanning capacitance microscopy

C. C. Williams, J. Slinkman, W. P. Hough et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1990 · 39 citations

Engineering, Microscopy, Dopant Density +18