A comparative study of the diffusion barrier properties of TiN and ZrN

Physics of Semiconductor Devices

Samarth Jain, S. Radhakrishna · 1987 · 4.2K citations

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Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

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TiN formed by evaporation as a diffusion barrier between Al and Si

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High-temperature contact structures for silicon semiconductor devices

M. Wittmer · Applied Physics Letters · 1980 · 111 citations

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ZrN diffusion barrier in aluminum metallization schemes

L. Krusin‐Elbaum, M. Wittmer, C. Y. Ting et al. · Thin Solid Films · 1983 · 75 citations

Natural Sciences, Materials Engineering, Materials Science +13