ZrN diffusion barrier in aluminum metallization schemes

Thin Films—Interdiffusion and Reactions

J. M. Poate, K. N. Tu, Jean-Claude Mayor et al. · Journal of The Electrochemical Society · 1979 · 1.7K citations

Natural Sciences, Materials Engineering, Materials Science +12

Diffusion barriers in thin films

M.−A. Nicolet · Thin Solid Films · 1978 · 684 citations

Natural Sciences, Materials Engineering, Materials Science +10

Metallurgical Thermochemistry.

A. V. Bradshaw · Chemical Engineering Science · 1968 · 548 citations

TiN formed by evaporation as a diffusion barrier between Al and Si

C. Y. Ting · Journal of Vacuum Science and Technology · 1982 · 168 citations

Natural Sciences, Materials Engineering, Materials Science +13

TiN and TaN as diffusion barriers in metallizations to silicon semiconductor devices

M. Wittmer · Applied Physics Letters · 1980 · 137 citations

Engineering, Materials Engineering, Materials Science +17