Concepedia

Tapered Etch Profiles

Tapered Etch Profile is an etching characteristic in bulk micromachining defined by a non-vertical sidewall geometry resulting from directional or chemical etching processes, distinguished by a gradual width variation along the etched feature’s depth.

26

Publications

682

Citations

120

Authors

31

Institutions

Publications per year

2017–2026

2

Parents

Publications

26

Investigation on ETC solar water heater using twisted tape inserts

Nallappan Gunasekaran, S. Raja, S. Sharavanan et al. · Materials Today Proceedings · 2021 · 72 citations · Full text

, , +10

Effects of plasma conditions on the shapes of features etched in Cl2 and HBr plasmas. I. Bulk crystalline silicon etching

M. A. Vyvoda, Hyoyoung Lee, M. V. Malyshev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 61 citations

, , +14

High Aspect Ratio Vertical Through-Vias for 3D MEMS Packaging Applications by Optimized Three-Step Deep RIE

Pradeep Dixit, Jianmin Miao · Journal of The Electrochemical Society · 2007 · 48 citations

, , +17

Profile evolution during polysilicon gate etching with low-pressure high-density Cl2/HBr/O2 plasma chemistries

Mutumi Tuda, Kenji Shintani, Hiroki Ootera · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 47 citations

, , +16

SiO<sub>2</sub> Tapered Etching Employing Magnetron Discharge of Fluorocarbon Gas

Tokuhisa Ohiwa, Keiji Horioka, T. Arikado et al. · Japanese Journal of Applied Physics · 1992 · 43 citations

, , +17

1–5 of 26

Authors

120

  1. KY
    Ki‐Yeon Yang

    Korea University, South Korea

    1 publications · 19 citations

    1

    h-index

  2. JT
    J. T. C. Lee

    1 publications · 61 citations

    1

    h-index

  3. HL
    Hong-Ji Lee

    Macronix International (Taiwan), Taiwan

    1 publications · 12 citations

    1

    h-index

  4. HL
    Hyoyoung Lee

    Sungkyunkwan University, South Korea

    1 publications · 61 citations

    1

    h-index

  5. RA
    R. A. Lasell

    Old Dominion University, United States

    1 publications · 15 citations

    1

    h-index

1–5 of 120

Institutions

31

  1. Tohoku University

    Sendai, Japan

    2 h-index

    5 publications

    160 citations

  2. Georgia Institute of Technology

    Atlanta, United States

    2 h-index

    4 publications

    123 citations

  3. Jeonbuk National University

    Jeonju, South Korea

    2 h-index

    4 publications

    62 citations

  4. Semiconductor Research Corporation

    Durham, United States

    1 h-index

    6 publications

    84 citations

  5. Social Service Sericulture Project Trust

    Dindigul, India

    1 h-index

    1 publications

    72 citations

  6. Sungkyunkwan University

    Seoul, South Korea

    1 h-index

    6 publications

    210 citations

  7. Vels University

    Chennai, India

    1 h-index

    1 publications

    72 citations

  8. Toshiba (Japan)

    Tokyo, Japan

    1 h-index

    5 publications

    215 citations

1–8 of 31

Venues

  1. 5

    h-index

  2. Japanese Journal of Applied Physics

    JJAP · 3 publications · 77 citations

    3

    h-index

  3. 3

    h-index

  4. Journal of The Electrochemical Society

    JES · 2 publications · 90 citations

    2

    h-index

  5. IEEE Photonics Technology Letters

    IPTEL · 1 publications · 15 citations

    1

    h-index

1–5