M. V. Malyshev

Diagnostics of inductively coupled chlorine plasmas: Measurements of the neutral gas temperature

Vincent M. Donnelly, M. V. Malyshev · Applied Physics Letters · 2000 · 159 citations

Cold Atmospheric Plasma, Engineering, Physics +12

Determination of electron temperatures in plasmas by multiple rare gas optical emission, and implications for advanced actinometry

M. V. Malyshev, Vincent M. Donnelly · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1997 · 141 citations

Electron Temperatures, Engineering, Plasma Science +21

Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl2+ and Cl+ densities

M. V. Malyshev, Nicholas Fuller, K. H. A. Bogart et al. · Journal of Applied Physics · 2000 · 138 citations

Cl2+ Densities, Engineering, Chlorine Plasma +16

Trace rare gases optical emission spectroscopy: Nonintrusive method for measuring electron temperatures in low-pressure, low-temperature plasmas

M. V. Malyshev, Vincent M. Donnelly · Physical review. E, Statistical physics, plasmas, fluids, and related interdisciplinary topics · 1999 · 131 citations

Electron Temperatures, Eedf Dependence, Engineering +19

Characterization of transformer coupled oxygen plasmas by trace rare gases-optical emission spectroscopy and Langmuir probe analysis

Nicholas Fuller, M. V. Malyshev, Vincent M. Donnelly et al. · Plasma Sources Science and Technology · 2000 · 124 citations

Langmuir Probe, Langmuir Probe Analysis, Engineering +16