Nicholas Fuller

High performance and highly uniform gate-all-around silicon nanowire MOSFETs with wire size dependent scaling

Sarunya Bangsaruntip, G. M. Cohen, A. Majumdar et al. · 2009 · 289 citations

Engineering, Excellent Electrostatic Scaling, High Performance +16

Diagnostics of inductively coupled chlorine plasmas: Measurement of Cl2+ and Cl+ densities

M. V. Malyshev, Nicholas Fuller, K. H. A. Bogart et al. · Journal of Applied Physics · 2000 · 138 citations

Cl2+ Densities, Engineering, Chlorine Plasma +16

MRONLINE

Min Li, Liangzhao Zeng, Shicong Meng et al. · 2014 · 130 citations

Parameter Space, Engineering, Data Science +12

Characterization of transformer coupled oxygen plasmas by trace rare gases-optical emission spectroscopy and Langmuir probe analysis

Nicholas Fuller, M. V. Malyshev, Vincent M. Donnelly et al. · Plasma Sources Science and Technology · 2000 · 124 citations

Langmuir Probe, Langmuir Probe Analysis, Engineering +16

Challenges and solutions of FinFET integration in an SRAM cell and a logic circuit for 22 nm node and beyond

Hikaru Kawasaki, V. Basker, T. Yamashita et al. · 2009 · 94 citations

Engineering, Vlsi Design, Sidewall Image Transfer +18