Concepedia

Kenji Shintani

KS

2

Publications

72

Citations

2

H-Index

2001

Active since

Affiliations

Mitsubishi Electric (Japan)(Current)

Kenji Shintani is an author at Mitsubishi Electric (Japan) specializing in engineering, applied physics, and surface science.

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Publications per year

2001–2001

2

Publications

2

Profile evolution during polysilicon gate etching with low-pressure high-density Cl2/HBr/O2 plasma chemistries

Mutumi Tuda, Kenji Shintani, Hiroki Ootera · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 47 citations

, , +13

Study of plasma–surface interactions during overetch of polycrystalline silicon gate etching with high-density HBr/O2 plasmas

Mutumi Tuda, Kenji Shintani, Junji Tanimura · Applied Physics Letters · 2001 · 25 citations

, , +13

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