Concepedia

M. A. Vyvoda

MA

Statistics

Publications

7

Citations

276

H-Index

7

Active since

1998

Affiliations

University of California, Berkeley(Current)

Matrix Research (United States)

M. A. Vyvoda is an author at University of California, Berkeley specializing in semiconductor devices, materials science, and natural sciences.

Publications per year

1998–2004

7

Publications

7

Role of sidewall scattering in feature profile evolution during Cl2 and HBr plasma etching of silicon

M. A. Vyvoda, M. Li, David B. Graves et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 69 citations

Natural Sciences, Materials Science, Physics +17

Effects of plasma conditions on the shapes of features etched in Cl2 and HBr plasmas. I. Bulk crystalline silicon etching

M. A. Vyvoda, Hyoyoung Lee, M. V. Malyshev et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1998 · 61 citations

Natural Sciences, Materials Science, Physics +14

3D TFT-SONOS memory cell for ultra-high density file storage applications

Andrew J. Walker, S. Nallamothu, E.-H. Chen et al. · 2004 · 46 citations

Engineering, Electrical Engineering, Materials Science +16

Vertical p–i–n Polysilicon Diode With Antifuse for Stackable Field-Programmable ROM

S. B. Herner, Abhijit Bandyopadhyay, S. V. Dunton et al. · IEEE Electron Device Letters · 2004 · 39 citations

Engineering, Electrical Engineering, Materials Science +17

Sheath structure of an electronegative plasma with cold positive ions

Ming Li, M. A. Vyvoda, S. K. Dew et al. · IEEE Transactions on Plasma Science · 2000 · 25 citations

Natural Sciences, Physics, Electromagnetics +9

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