Concepedia

M. Li

ML

Statistics

Publications

2

Citations

88

H-Index

2

Active since

1999

Affiliations

University of California, Berkeley(Current)

M. Li is an author at University of California, Berkeley specializing in natural sciences, plasma-wall interactions, and surface science.

Publications per year

1999–2000

2

Publications

2

Role of sidewall scattering in feature profile evolution during Cl2 and HBr plasma etching of silicon

M. A. Vyvoda, M. Li, David B. Graves et al. · Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures Processing Measurement and Phenomena · 2000 · 69 citations

, , +17

Hardmask charging during Cl2 plasma etching of silicon

M. A. Vyvoda, M. Li, David B. Graves · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 1999 · 19 citations

, , +16

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