15
Publications
340
Citations
13
H-Index
1980
Active since
Keiji Horioka is an author at Toshiba (Japan) specializing in engineering, materials science, and applied physics.
Top concepts
EngineeringMaterial ScienceApplied PhysicsSurface ScienceMicroelectronicsMaterials EngineeringMicrofabricationChemistryElectrical EngineeringMechanical Engineering
Publications per year
1980–2000
15
15
Single Silicon Etching Profile Simulation
T. Arikado, Keiji Horioka, Makoto Sekine et al. · Japanese Journal of Applied Physics · 1988 · 31 citations
Engineering, Electron-beam Lithography, Mechanical Engineering +17
Rows per page
1–5 of 15