Pattern Defect Reduction

Pattern Defect Reduction is a methodological framework in thin-film patterning that systematically minimizes deviations from intended pattern geometries by identifying, analyzing, and mitigating sources of defects during fabrication processes.

Publications

1.9K

Citations

390

Authors

Institutions

Publications per year

2017–2026

Parents

Thin-film Patterning

Publications

Dense Self‐Assembly on Sparse Chemical Patterns: Rectifying and Multiplying Lithographic Patterns Using Block Copolymers

Joy Cheng, Charles Rettner, Daniel P. Sanders et al. · Advanced Materials · 2008 · 307 citations

Natural Sciences, Materials Engineering, Materials Science +17

Growth of semiconductor heterostructures on patterned substrates: defect reduction and nanostructures

A. Madhukar · Thin Solid Films · 1993 · 69 citations

Engineering, Materials Engineering, Materials Science +16

Reconstruction Of Surfaces Of 3-D Objects By M-array Pattern Projection Method

Hiroshi Morita, K. Yajima, Shojiro Sakata · 2005 · 67 citations

Computing, Computer Science, 3D Modeling +15

Defect reduction method in (11-22) semipolar GaN grown on patterned sapphire substrate by MOCVD: Toward heteroepitaxial semipolar GaN free of basal stacking faults

Florian Tendille, P. de Mierry, P. Vennéguès et al. · Journal of Crystal Growth · 2014 · 65 citations

Engineering, Materials Engineering, Materials Science +16

Nanoimprint lithography for semiconductor devices and future patterning innovation

Tatsuhiko Higashiki, Tetsuro Nakasugi, Ikuo Yoneda · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2011 · 63 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +10

1–5 of 63

Authors

390

MS
Mark Somervell
IMEC, Belgium
4 publications · 110 citations
4
h-index
SV
S. V. Sreenivasan
The University of Texas at Austin, United States
3 publications · 71 citations
3
h-index
JB
Joost Bekaert
IMEC, Belgium
3 publications · 84 citations
3
h-index
RG
Roel Gronheid
IMEC, Belgium
3 publications · 83 citations
3
h-index
HZ
Hongbo Zhang
University of Illinois Urbana-Champaign, United States
3 publications · 54 citations
3
h-index

1–5 of 390

Institutions

1–8 of 88

Venues

Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE
23 publications · 553 citations
14
h-index
Journal of Crystal Growth
7 publications · 248 citations
7
h-index
Japanese Journal of Applied Physics
JJAP · 3 publications · 91 citations
3
h-index
IEEE Transactions on Semiconductor Manufacturing
2 publications · 30 citations
2
h-index
Annals of Plastic Surgery
1 publications · 49 citations
1
h-index

1–5