Doni Parnell

Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +15

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 38 citations

Natural Sciences, Materials Engineering, Materials Science +17

High-volume manufacturing equipment and processing for directed self-assembly applications

Mark Somervell, Takashi Yamauchi, Soichiro Okada et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 22 citations

Engineering, Materials Engineering, Materials Science +11

Demonstration of an N7 integrated fab process for metal oxide EUV photoresist

Danilo De Simone, Ming Mao, Michael Kocsis et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 21 citations

Engineering, Materials Engineering, Materials Science +17

Progress in directed self-assembly hole shrink applications

Todd R. Younkin, Roel Gronheid, Paulina Rincon Delgadillo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 20 citations

Natural Sciences, Materials Engineering, Materials Science +16