Mark Somervell

Implementation of templated DSA for via layer patterning at the 7nm node

Roel Gronheid, Jan Doise, Joost Bekaert et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 114 citations

Engineering, Materials Engineering, Materials Science +17

Pattern scaling with directed self assembly through lithography and etch process integration

Benjamen M. Rathsack, Mark Somervell, Josh Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 53 citations

Engineering, Materials Engineering, Materials Science +16

Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations

Natural Sciences, Materials Engineering, Materials Science +15

All track directed self-assembly of block copolymers: process flow and origin of defects

Paulina A. Rincon Delgadillo, Roel Gronheid, Christopher J. Thode et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +15

Rapid and Selective Deposition of Patterned Thin Films on Heterogeneous Substrates via Spin Coating

Yuanyi Zhang, Colton D'Ambra, Reika Katsumata et al. · ACS Applied Materials & Interfaces · 2019 · 42 citations

Natural Sciences, Chemistry, Materials Science +17