Paulina Rincon Delgadillo

Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations

Engineering, Dsa Program, Defect Stability +21

Three-Tone Chemical Patterns for Block Copolymer Directed Self-Assembly

Lance Williamson, Robert N. Seidel, Xuanxuan Chen et al. · ACS Applied Materials & Interfaces · 2016 · 50 citations

Engineering, Brush Grafting, Molecular Self-assembly +16

Defect source analysis of directed self-assembly process (DSA of DSA)

Paulina Rincon Delgadillo, Ryota Harukawa, Mayur Suri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 48 citations

Defect source analysis of directed self-assembly process

Paulina Rincon Delgadillo, Mayur Suri, Stéphane Durant et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 27 citations

Optical Materials, Engineering, Industrial Engineering +18

Comparison of directed self-assembly integrations

Mark Somervell, Roel Gronheid, Joshua Hooge et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 26 citations

Engineering, Molecular Self-assembly, Computer Architecture +21