Statistics
Publications
5
Citations
162
H-Index
5
Active since
2013
Affiliations
Ryota Harukawa is an author at University of Chicago specializing in defects, semiconductor devices, and semiconductor defects.
Publications per year
2013–2015
5
5
Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow
Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations
Natural Sciences, Materials Engineering, Materials Science +15
Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow
Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations
Engineering, Manufacturing Engineering, Digital Fabrication +16
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