Concepedia

Hareen Bayana

HB

2

Publications

50

Citations

2

H-Index

2015

Active since

Affiliations

University of Chicago

KLA (United States)

Hareen Bayana is an author at IMEC specializing in materials engineering, defect tolerance, and electronic packaging.

Top concepts

EngineeringApplied PhysicsDefect ToleranceMaterial ScienceMicroelectronicsMicrofabricationElectronic PackagingMaterials EngineeringChemistryBiophysics

Publications per year

2015–2015

2

Publications

2

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 37 citations

Materials Science, Materials Engineering, Defect Tolerance +14

Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations

Engineering, Mechanical Engineering, Root Cause Studies +17

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