Statistics
Publications
4
Citations
119
H-Index
4
Active since
2008
Affiliations
Hari Pathangi is an author at IMEC specializing in semiconductor devices, electronic materials, and semiconductor defects.
Publications per year
2008–2015
4
4
Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow
Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations
Natural Sciences, Materials Engineering, Materials Science +15
Self-detecting gate-tunable nanotube paddle resonators
B. Witkamp, Menno Poot, Hari Pathangi et al. · Applied Physics Letters · 2008 · 17 citations · Full text
Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow
Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations
Engineering, Manufacturing Engineering, Digital Fabrication +16
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