Hari Pathangi

Defect reduction and defect stability in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Roel Gronheid, Paulina Rincon Delgadillo, Hari Pathangi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2014 · 51 citations

Engineering, Dsa Program, Defect Stability +21

Defect mitigation and root cause studies in 14 nm half-pitch chemo-epitaxy directed self-assembly LiNe flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2015 · 37 citations

Materials Science, Materials Engineering, Defect Tolerance +14

Self-detecting gate-tunable nanotube paddle resonators

B. Witkamp, Menno Poot, Hari Pathangi et al. · Applied Physics Letters · 2008 · 16 citations · Full text

Electrical Engineering, Vibrations, Engineering +13

Defect mitigation and root cause studies in IMEC's 14nm half-pitch chemo-epitaxy DSA flow

Hari Pathangi, Boon Teik Chan, Hareen Bayana et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 13 citations

Engineering, Mechanical Engineering, Root Cause Studies +17