Concepedia

Mayur Suri

MS

2

Publications

75

Citations

2

H-Index

2013

Active since

Affiliations

KLA (United States)(Current)

IMEC

University of Chicago

KU Leuven

Mayur Suri is an author at KLA (United States) specializing in industrial engineering, self-assembly, and industrial design.

Top concepts

Publications per year

2013–2013

2

Publications

2

Defect source analysis of directed self-assembly process (DSA of DSA)

Paulina Rincon Delgadillo, Ryota Harukawa, Mayur Suri et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 48 citations

Defect source analysis of directed self-assembly process

Paulina Rincon Delgadillo, Mayur Suri, Stéphane Durant et al. · Journal of Micro/Nanolithography MEMS and MOEMS · 2013 · 27 citations

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