Concepedia

Paulina A. Rincon Delgadillo

PA

Statistics

Publications

7

Citations

296

H-Index

7

Active since

2011

Affiliations

IMEC(Current)

University of Wisconsin–Madison

University of Chicago

SunEdison (United States)

Tokyo Electron (Japan)

Paulina A. Rincon Delgadillo is an author at IMEC specializing in materials science, materials engineering, and fabrication materials.

Publications per year

2011–2018

7

Publications

7

Implementation of a chemo-epitaxy flow for directed self-assembly on 300-mm wafer processing equipment

Paulina A. Rincon Delgadillo · Journal of Micro/Nanolithography MEMS and MOEMS · 2012 · 94 citations

Engineering, Materials Engineering, Materials Science +17

Towards an all-track 300 mm process for directed self-assembly

Chi‐Chun Liu, Christopher J. Thode, Paulina A. Rincon Delgadillo et al. · Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena · 2011 · 64 citations

Engineering, Materials Engineering, Materials Science +12

All track directed self-assembly of block copolymers: process flow and origin of defects

Paulina A. Rincon Delgadillo, Roel Gronheid, Christopher J. Thode et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2012 · 48 citations

Natural Sciences, Materials Engineering, Materials Science +15

Engineering the Kinetics of Directed Self-Assembly of Block Copolymers toward Fast and Defect-Free Assembly

Jiaxing Ren, Chun Zhou, Xuanxuan Chen et al. · ACS Applied Materials & Interfaces · 2018 · 30 citations

Natural Sciences, Materials Engineering, Materials Science +17

Process sensitivities in exemplary chemo-epitaxy directed self-assembly integration

Paulina A. Rincon Delgadillo, Roel Gronheid, Guanyang Lin et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2013 · 22 citations

Natural Sciences, Materials Engineering, Materials Science +17

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